JPH0166059U - - Google Patents
Info
- Publication number
- JPH0166059U JPH0166059U JP1987160548U JP16054887U JPH0166059U JP H0166059 U JPH0166059 U JP H0166059U JP 1987160548 U JP1987160548 U JP 1987160548U JP 16054887 U JP16054887 U JP 16054887U JP H0166059 U JPH0166059 U JP H0166059U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sectional area
- flow rate
- inductively coupled
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160548U JPH0166059U (en]) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160548U JPH0166059U (en]) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166059U true JPH0166059U (en]) | 1989-04-27 |
Family
ID=31442705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160548U Pending JPH0166059U (en]) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166059U (en]) |
-
1987
- 1987-10-20 JP JP1987160548U patent/JPH0166059U/ja active Pending
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